Numéro
J. Phys. IV France
Volume 03, Numéro C3, Août 1993
Proceedings of the Ninth European Conference on Chemical Vapour Deposition
Page(s) C3-83 - C3-90
DOI http://dx.doi.org/10.1051/jp4:1993310
Proceedings of the Ninth European Conference on Chemical Vapour Deposition

J. Phys. IV France 03 (1993) C3-83-C3-90

DOI: 10.1051/jp4:1993310

Heat transfer studies in cold CVD reactors using holographic interferometry

H. CHEHOUANI1, S. BENET1, S. BRUNET1 and B. ARMAS2

1  LPA, Université de Perpignan, 66860 Perpignan, France
2  IMP/CNRS, BP. 5, 66120 Odeillo, France


Abstract
The evaluation of holographic interferograms has been reviewed to perform quasi-real time and more accurate measurements of temperature fields within CVD reactors. In this way a powerful image processing device has been annexed to our optical arrangement to perform suitable and fast data acquisition. The evaluation of holographic interferograms is achieved using Fast Fourier Transform algorithm. Temperature fields have been measured within a large cold wall CVD reactor for different cylindrical substrate diameters and also for a conic substrate. We present some useful empirical correlations between Nusselt and Rayleigh numbers. Our aim in this paper is to give some useful experimental data which could be used to improve the validity of mathematical models developed for CVD process.



© EDP Sciences 1993