Numéro
J. Phys. IV France
Volume 03, Numéro C3, Août 1993
Proceedings of the Ninth European Conference on Chemical Vapour Deposition
Page(s) C3-75 - C3-82
DOI http://dx.doi.org/10.1051/jp4:1993309
Proceedings of the Ninth European Conference on Chemical Vapour Deposition

J. Phys. IV France 03 (1993) C3-75-C3-82

DOI: 10.1051/jp4:1993309

The thermodynamic properties of tetraethoxysilane (TEOS) and an infrared study of its thermal decomposition

M.G.M. VAN DER VIS, E.H.P. CORDFUNKE and R.J.M. KONINGS

Netherlands Energy Research Foundation ECN, P.O. Box 1, 1755 ZG Petten, The Netherlands


Abstract
A review is given on the determination of the thermodynamic properties of Si(OC2H5)4 (TEOS, tetraethoxysilane). In addition, the thermal decomposition of TEOS has been studied by in-situ IR spectroscopy. The decomposition products in the gas phase in the absence of oxygen are organic fragments (ethanol, ethanal, ethene, methane, carbon monoxide), and in the presence of oxygen water, carbon dioxide, ethanal and methanal. The results are compared with thermodynamic equilibrium calculations and kinetic models.



© EDP Sciences 1993