Numéro
J. Phys. IV France
Volume 03, Numéro C3, Août 1993
Proceedings of the Ninth European Conference on Chemical Vapour Deposition
Page(s) C3-67 - C3-74
DOI http://dx.doi.org/10.1051/jp4:1993308
Proceedings of the Ninth European Conference on Chemical Vapour Deposition

J. Phys. IV France 03 (1993) C3-67-C3-74

DOI: 10.1051/jp4:1993308

On the kinetics of modified CVD in porous ceramics

G.Z. CAO, H.W. BRINKMAN, J. MEIJERINK, K.J. DE VRIES and A.J. BURGGRAAF

Laboratory of Inorganic Chemistry, Materials Science and Catalysis, Department of Chemical Engineering, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands


Abstract
This paper reports a kinetic study on modified CVD process in porous ceramic substrates by both theoretical analysis and experimental approach. The theoretical analysis indicates that with a heterogeneous chemical reaction the decrease of the pore size is proportional to the deposition time and the pore closure time is proportional to the original pore size. While for a homogeneous reaction the pore size decreases exponentially with the deposition time and it is very difficult to achieve pore closure. The experimental results indicate that the deposition of YSZ in porous ceramics is a heterogeneous reaction.



© EDP Sciences 1993