J. Phys. IV France 03 (1993) C3-25-C3-33
Investigation of the kinetics of MOCVD with a stagnation cellO. YU GORBENKO1, W. DECKER2 and G. WAHL2
1 Dept. of Chemistry, Moscow State University, B-234,119899 Moscow, Russia
2 Institut für Oberflächentechnik, Technische Universität Braunschweig, Bienroder Weg 53, 38108 Braunschweig, Germany
Solutions of the mass transfer equation in the stagnation cell are described. It is shown that the application of the stagnation cell can be used for the determination of Das, distinguishing different types of process control, sensoring gas phase condensation and homogeneous nucleation. The results obtained with cylindrical cell for MOCVD of YBCO are discussed.
© EDP Sciences 1993