Numéro
J. Phys. IV France
Volume 03, Numéro C3, Août 1993
Proceedings of the Ninth European Conference on Chemical Vapour Deposition
Page(s) C3-25 - C3-33
DOI http://dx.doi.org/10.1051/jp4:1993303
Proceedings of the Ninth European Conference on Chemical Vapour Deposition

J. Phys. IV France 03 (1993) C3-25-C3-33

DOI: 10.1051/jp4:1993303

Investigation of the kinetics of MOCVD with a stagnation cell

O. YU GORBENKO1, W. DECKER2 and G. WAHL2

1  Dept. of Chemistry, Moscow State University, B-234,119899 Moscow, Russia
2  Institut für Oberflächentechnik, Technische Universität Braunschweig, Bienroder Weg 53, 38108 Braunschweig, Germany


Abstract
Solutions of the mass transfer equation in the stagnation cell are described. It is shown that the application of the stagnation cell can be used for the determination of Das, distinguishing different types of process control, sensoring gas phase condensation and homogeneous nucleation. The results obtained with cylindrical cell for MOCVD of YBCO are discussed.



© EDP Sciences 1993