Numéro
J. Phys. IV France
Volume 01, Numéro C7, Décembre 1991
2nd International Conference
Laser M2P
Page(s) C7-671 - C7-671
DOI http://dx.doi.org/10.1051/jp4:19917179
2nd International Conference
Laser M2P

J. Phys. IV France 01 (1991) C7-671-C7-671

DOI: 10.1051/jp4:19917179

EXCIMER-LASER-INDUCED CHEMICAL VAPOR DEPOSITION OF COPPER FILMS FROM COPPER TRIFLUOROACETYLACETONATE

E.N. ANTONOV, V.N. BAGRATASHVILI, O.V. FATEEV and V.A. SEMCHISHEN

Scientific Research Centre for Technological Lasers, Ac. Sci. USSR, Moscow Region Pionerskaya 2, Troitsk 142092, USSR

Without abstract




© EDP Sciences 1991
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