2nd International Workshop
J. Phys. IV France 01 (1991) C6-337-C6-341
A SUPERIOR CATHODOLUMINESCENCE SPECTRAL ANALYSIS AND IMAGING SYSTEMP.J. WRIGHT
Oxford Instruments Ltd, Old Station Way, GB-Eynsham OX8 1TL, Great-Britain
A low loss CL collection and analysis system that allows turnkey operation both for imaging and spectral analysis from 0.2 to 1.8 microns is described. Results obtained on Quantum well structures, MgO and Silicon are given. The results on Silicon show that CL spectroscopy can distinguish between regions of the sample which are averaged in the PL spectrum.
© EDP Sciences 1991