2nd International Workshop
J. Phys. IV France 01 (1991) C6-51-C6-56
COMPUTER PROCESSING OF EBIC SIGNALSO.V. KONONCHUK, N.G. USHAKOV, E.B. YAKIMOV and S.I. ZAITSEV
Institute of Microelectronics Technology and High Purity Materials, Academy of Sciences of the USSR, Chernogolovka, Moscow District 142432, USSR
Some aspects of the use of computational methods are studied for quantitative EBIC measurements. It is investigated the problem of the determination of the bulk distribution of the diffusion length. Both parametric and nonparametric approaches are considered.
© EDP Sciences 1991