2nd International Workshop
J. Phys. IV France 01 (1991) C6-29-C6-34
RECENT STATE OF THE THEORY OF THE METHODS OF INDUCED CONCENTRATIONA.V. SAMSONOVICH, V.V SIROTKIN, N.G. USHAKOV and S.I. ZAITSEV
Institute of Microelectronics Technology, Academy of Sciences of USSR, Chernogolovka, Moscow District 142432, USSR
A set of diagnostic methods called as methods of induced concentration (MIC) results in the same signal equation. The equation allows one to solve the direct and inverse problems. The method of Q-variation is described and its accuracy for many-electrode EBIC is numerically estimated. Nontraditional application of MIC is argued for relief investigation.
© EDP Sciences 1991