Numéro
J. Phys. IV France
Volume 02, Numéro C2, Septembre 1991
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse
Page(s) C2-713 - C2-720
DOI http://dx.doi.org/10.1051/jp4:1991286
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse

J. Phys. IV France 02 (1991) C2-713-C2-720

DOI: 10.1051/jp4:1991286

THE Ba-PROBLEM IN CVD-YBa2 Cu3 O7-[MATH] HTC SUPERCONDUCTORS

E. FITZER1, H. OETZMANN2, F. SCHMADERER2 and G. WAHL3

1  Institut für Chemische Technik der Universität Karlsruhe, Germany
2  Asea Brown Boveri AG, Corporate Research Heidelberg, P.O. Box 10 13 32, D-6900 Heidelberg 1, Germany
3  Institut für Oberflächentechnik der Technischen, Universität Braunschweig, Germany


Abstract
The evaporation behaviour of Ba(thd)2 in a CVD-process for HTc-Superconductors is presented. The long-time stability as well as possibilities to increase the evaporation rates by changing the geometry of the evaporator and the process conditions are discussed.



© EDP Sciences 1991