Numéro
J. Phys. IV France
Volume 02, Numéro C2, Septembre 1991
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse
Page(s) C2-673 - C2-680
DOI http://dx.doi.org/10.1051/jp4:1991281
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse

J. Phys. IV France 02 (1991) C2-673-C2-680

DOI: 10.1051/jp4:1991281

NEW COMPOUNDS OBTAINED BY LPCVD IN THE B-C-N CHEMICAL SYSTEM

F. SAUGNAC1, F. TEYSSANDIER2 and A. MARCHAND3

1  AEROSPATIALE AQUITAINE, BP 11, F-33165 Saint Médard en Jalles cedex, France
2  IMP CNRS, avenue de Villeneuve, F-66860 Perpignan cedex, France
3  CRPP CNRS, Chateau Brivazac, avenue Schweitzer, F-33600 Pessac, France


Abstract
The composition and some physical properties of boron-carbon- nitrogen solid solutions prepared by chemical vapor deposition (CVD) have been investigated. Crystalline and amorphous films resulting from heterogeneous nucleation were characterized by X-ray diffraction, XPS, RBS and TEM. The compositions of these single-phase materials are concentrated in two domains located in the B/N>1 part of the B-C-N composition diagram. The carbon-rich domain corresponds to an ideal C5B2N composition with various structural defects. The thermal stability behavior of these films is characterized by the absence of any mass loss after 1 hour at 1700°C while graphitization and formation of small amounts of B13C2 are observed. Density and electrical conductivity measurements were also performed.



© EDP Sciences 1991