Numéro
J. Phys. IV France
Volume 02, Numéro C2, Septembre 1991
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse
Page(s) C2-625 - C2-631
DOI http://dx.doi.org/10.1051/jp4:1991275
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse

J. Phys. IV France 02 (1991) C2-625-C2-631

DOI: 10.1051/jp4:1991275

TITANOCENE-DICHLORIDE AS A METALORGANIC SOURCE FOR TITANIUM CARBIDE

J. SLIFIRSKI1, G. HUCHET1 and F. TEYSSANDIER2

1  CNRS Institut de Science et de Génie des Matériaux et Procédés, Université, avenue de Villeneuve, F-66860 Perpignan cedex, France
2  Etablissement Technique Central de l'Armement, 16 bis avenue Prieur de la Côte d'Or, F-94114 Arceuil cedex, France


Abstract
The use of titanocene-dichloride (Cp2TiCl2) as a metalorganic precursor for TiC coating provides layers of very different quality according to its temperature of vaporization in a cold wall CVD reactor. The deposits observed by SEM and characterized by EPMA are related to the experimental procedure. The thermal behavior of the precursor investigated by thermogravimetry (TG), thermogravimetry coupled with differential thermal analysis (TG-DTA) and mass spectroscopy (MS) is used to determine the structural state of Cp2TiCl2 active from a CVD point of view.



© EDP Sciences 1991