J. Phys. IV France 02 (1991) C2-601-C2-608
ADHERENCE AND PROPERTIES OF SILICON CARBIDE BASED FILMS ON STEELM. LELOGEAIS1, M. DUCARROIR1 and R. BERJOAN2
1 CNRS-IMP, Université, 52 avenue de Villeneuve, F-66860 Perpignan cedex, France
2 CNRS-IMP, BP 5 Odeillo, F-66120 Font Romeu, France
Coatings of silicon carbide with various compositions have been obtained in a r.f plasma assisted process using tetramethylsilane and argon as input gases. Some properties against mechanical applications of such deposits on steel have been investigated. Residual stresses and hardness are reported and discussed in relation with plasma parameters and deposit composition. By scratch testing, it was shown that the silicon carbide films on steel denote a good adherence when compared with previous data encoutered in the litterature for titanium carbide or nitride deposits though low critical load values. Adherence is discussed in relation to the nature of the interfacial zone examined hy Auger depth profiling. It is conclude that the films have promising variable properties which can be optimized by acting on plasma parameters.
© EDP Sciences 1991