Numéro
J. Phys. IV France
Volume 02, Numéro C2, Septembre 1991
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse
Page(s) C2-563 - C2-570
DOI http://dx.doi.org/10.1051/jp4:1991267
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse

J. Phys. IV France 02 (1991) C2-563-C2-570

DOI: 10.1051/jp4:1991267

COMPOSITION OSCILLATIONS IN HARD MATERIAL LAYERS DEPOSITED FROM THE VAPOUR PHASE

K. BARTSCH, A. LEONHARDT and E. WOLF

Central Institute of Solid State Physics and Materials Research, Helmholtzstr. 20, D-0-8027 Dresden, Germany


Abstract
For the deposition of hard layers on hard metals from the gas phase in the systems Ti-C-B, Ti-N-B, Ti-V-C-O, Ti-Zr-C, Ti-C-N, Ti-C, B-C and Si-C at selected deposition conditions the existence of oscillations was established, which result in a lamellar structure of the layers. As shown by Auger-Spectroscopic analyses the composition of the lamellas changes alternately. Reasons for the lamellar deposition are discussed and a qualitative macroscopic model is presented.



© EDP Sciences 1991