Numéro
J. Phys. IV France
Volume 02, Numéro C2, Septembre 1991
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse
Page(s) C2-509 - C2-537
DOI http://dx.doi.org/10.1051/jp4:1991263
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse

J. Phys. IV France 02 (1991) C2-509-C2-537

DOI: 10.1051/jp4:1991263

CHEMICAL VAPOUR DEPOSITON - A REVIEW OF 25 YEARS EXPERIENCE

E. FITZER

Institut fuer Chemische Technik der Universitaet Karlsruhe, Kaiserstrasse 12, D-7500 Karlsruhe 1, Germany


Abstract
This paper describes studies of CVD processes of technical relevance, in which some unusual and unexpected phenomena have been observed. It offers, furthermore, explanations, solutions to problems, and ways of mathematical modelling. At the start, reaction and diffusion layers on iron and on molybdenum are considered. Because of overlapping metallurgical difficulties, the further studies are restricted to CVD overlay coatings. The "aluminizing" of the cooling channels in turbine blades made of Ni based superalloys by the subchloride process and MoSi2 deposition on refractory alloys with diffusion barriers are described.



© EDP Sciences 1991