Numéro
J. Phys. IV France
Volume 02, Numéro C2, Septembre 1991
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse
Page(s) C2-449 - C2-457
DOI http://dx.doi.org/10.1051/jp4:1991255
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse

J. Phys. IV France 02 (1991) C2-449-C2-457

DOI: 10.1051/jp4:1991255

CVD EXHAUST - SAFETY AND ENVIRONMENTAL SANITY

M.L. HAMMOND

PlasmaChem Inc, 505 East Evelyn Avenue, Mountain View, CA 94041, U.S.A.


Abstract
Both atmospheric pressure and low pressure CVD reactors generate substantial quantities of hazardous waste. Burn boxes and wet scrubbers remove much of this waste from atmospheric pressure exhausts ; however, these methods are inefficient for CVD reactors using vacuum. Unless otherwise treated, the hazardous and toxic effluents distributed along the reactor exhaust system cause excessive vacuum pump maintenance, clogged exhaust lines, unscheduled downtime, the possibility of fire or other health/safety risks, and maximize the total cost of disposal. Scrubbing these effluents in the vacuum system before they reach the vacuum pump provides the safest and lowest cost method of handling such toxic wastes.



© EDP Sciences 1991