Numéro
J. Phys. IV France
Volume 02, Numéro C2, Septembre 1991
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse
Page(s) C2-337 - C2-342
DOI http://dx.doi.org/10.1051/jp4:1991241
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse

J. Phys. IV France 02 (1991) C2-337-C2-342

DOI: 10.1051/jp4:1991241

GENERATION OF THREE-DIMENSIONAL FREE-STANDING MICRO-OBJECTS BY LASER CHEMICAL PROCESSING

O. LEHMANN and M. STUKE

Max-Planck-Institut für Biophys. Chemie, Postfach 2841, D-3400 Göttingen, Germany


Abstract
Three-Dimensional free standing micro-objects in the micrometer range were created using Laser Chemical Vapor Deposition (LCVD) of aluminum from aluminum-trihydridetrimethylamine. A dense grid of thin lines (about 10 µm diameter) was deposited on a preformed polycarbonate substrate using a two-step-process. The substrate was removed by dissolving it in a suitable solvent after ablating an unsoluble by-product by UV excimer laser pulses. The result is a free-standing three-dimensional aluminum grid micro-structure.



© EDP Sciences 1991