Numéro
J. Phys. IV France
Volume 02, Numéro C2, Septembre 1991
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse
Page(s) C2-209 - C2-216
DOI http://dx.doi.org/10.1051/jp4:1991226
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse

J. Phys. IV France 02 (1991) C2-209-C2-216

DOI: 10.1051/jp4:1991226

SYNTHESIS AND STRUCTURE OF NONSTOICHIOMETRIC δ-NbN1+y FILMS

E.V. SHALAEVA, M.V. KUZNETSOV, R.S. BARYSHEV and B.V. MITROFANOV

Institute of Chemistry, Urals Division of Academy of Sciences of the USSR, Pervomayskaya 91, Sverdlovsk GSP-145, USSR


Abstract
The structural state of oriented nonstoichiometric δ-NbN1.2 films (NaCl-type structure) prepared by reactive ion plasma sputtering has been studied by transmission electron microscopy and photoelectron spectroscopy. An intensive diffuse scattering has been found on the microdiffraction patterns. The diffuse scattering distribution in the reciprocal space, the regularities of intensity vanishing, as well as the dependence of diffuse scattering on the N/Nb ratio, carbon and oxygen impurity atoms have been determined. It has been concluded that the diffuse scattering observed in δ-NbN films with a nitrogen content surplus (N/Nb=1.2) is caused by the atomic displacement wave spectrum in the range of [MATH] ([MATH] is a δ-NbN reciprocal lattice vector, [MATH] corresponding to 0.9 [MATH], 0.9 [MATH]). The atom displacement waves are possibly related to δ-NbN - Nb4N5 phase transition.



© EDP Sciences 1991