J. Phys. IV France 02 (1991) C2-963-C2-968
A STUDY OF GAS SENSING PROPERTIES OF OXIDE MULTILAYER THIN FILMSD. GUORUI
Department of Electronic Science, Jilin University, 79 Jiefang Road, Changchun 130021, P.R. China
The film structures and gas sensing properties of Fe2 O3-TiO2-SnO2 oxide multilayer thin film deposited onto the silicon or the ceramic substrates have been studied in this paper. The unique double sensing characteristic of the multilayer thin films had high sensitivity and excellent selectivity to NOx and C2H5OH gas was found. It is considered to be caused by the heterojunction and sieving effects.
© EDP Sciences 1991