Numéro
J. Phys. IV France
Volume 02, Numéro C2, Septembre 1991
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse
Page(s) C2-939 - C2-944
DOI http://dx.doi.org/10.1051/jp4:19912113
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse

J. Phys. IV France 02 (1991) C2-939-C2-944

DOI: 10.1051/jp4:19912113

ELECTRON SIGNIFICANCE TO DIAMOND SYNTHESIS IN PLASMA ENHANCED CVD PROCESS

S.F. MITURA

Institute of Materials Science and Metals Technology, Technical University of zódz, Zwirki 36, 90-924, zódz, Poland


Abstract
The role of electrons in the process of diamond synthesis in radio frequency hydrocarbon plasma has been shown. Polycrystalline diamond films were grown when electrons from an independent source were used. Without the electrons the amorphous carbon films were observed.



© EDP Sciences 1991