J. Phys. IV France 02 (1991) C2-939-C2-944
ELECTRON SIGNIFICANCE TO DIAMOND SYNTHESIS IN PLASMA ENHANCED CVD PROCESSS.F. MITURA
Institute of Materials Science and Metals Technology, Technical University of zódz, Zwirki 36, 90-924, zódz, Poland
The role of electrons in the process of diamond synthesis in radio frequency hydrocarbon plasma has been shown. Polycrystalline diamond films were grown when electrons from an independent source were used. Without the electrons the amorphous carbon films were observed.
© EDP Sciences 1991