J. Phys. IV France 02 (1991) C2-907-C2-913
DIAMOND CHEMICAL VAPOUR DEPOSITIONP.K. BACHMANN, D. LEERS and D.U. WIECHERT
Philips Research Laboratories, CVD Technology Group, D-5100 Aachen, Germany
Preparation, characterisation and selected applications of vapour deposited diamond coatings and free-standing membranes are reviewed. General trends and implications of a C/H/O-phase diagram, which provides a common basis for all diamond CVD methods are discussed.
© EDP Sciences 1991