J. Phys. IV France 129 (2005) 147-150
Ion implanted substrates for SAW gas sensors*M. Pasternak1 and K. Jasek2
1 Institute of Radioelectronic, Military University of Technology, 00-490 Warsaw, Poland
2 Institute of Chemistry, Military University of Technology, 00-490 Warsaw, Poland
An approach to fundamental properties analysis of high frequency surface acoustic wave (SAW) gas sensors basing on an ion implanted substrate has been described in the paper. The results of analytical calculation shows a practical significance of the composite for high frequency SAW sensors technology.
© EDP Sciences 2005